This talk reports an integrated forward-view 2-axis MEMS scanner that enables ultra-small LiDAR for applications in micro-air vehicles (MAVs). The forward-view raster scan is realized by a pair of vertically-oriented 2-axis scanning MEMS mirrors integrated on a single silicon substrate.
We report progress on precision optical microstructures such as a postage stamp-sized optics table aimed at miniaturization and cost reduction of navigation-grade gyroscopes. Other chip-scale developments include an optical waveguide-based laser gyroscope, and resonant opto-mechanical structures with optical readout, for gun-hard gyroscopes and accelerometers, respectively.
Developments in the area of phase-change MEMS actuators has enabled fast and low power electrical and optical actuation of bistable MEMS actuators. By harnessing small volumes of SMA phase change actuator material, we have demonstrated electrical actuation beyond 1 kHz, below 10 mW.
LLNL has developed a MEMS micromirror array design capable of large range of motion (+/-15deg mechanical), high speed (30+khz bandwidth), large apertures (2cm), high fill factor (>99%), and precision closed-loop control to provide coherent aperture operation in harsh and high noise environments.