TuC4.1 - MINIATURE LIDAR BASED ON ELECTROTHERMAL MEMS SCANNING MIRRORS
Abstract
Abstract
This talk reports an integrated forward-view 2-axis MEMS scanner that enables ultra-small LiDAR for applications in micro-air vehicles (MAVs). The forward-view raster scan is realized by a pair of vertically-oriented 2-axis scanning MEMS mirrors integrated on a single silicon substrate.
TuC4.2 - OPTICAL MICROSTRUCTURES FOR HIGH PERFORMANCE INERTIAL SENSORS
- B. Pant (US) Honeywell Aerospace
- N. Krueger (US) Honeywell Aerospace
- W. Williams (US) Honeywell Aerospace
- G. Sanders (US) Honeywell Aerospace
- J. Wu (US) Honeywell Aerospace
- K. Nelson (US) Honeywell Aerospace
- C. Fertig (US) Honeywell Aerospace
- R. Compton (US) Honeywell Aerospace
- G. Lodden (US) Honeywell Aerospace
- E. Benser (US) Honeywell Aerospace
Abstract
Abstract
We report progress on precision optical microstructures such as a postage stamp-sized optics table aimed at miniaturization and cost reduction of navigation-grade gyroscopes. Other chip-scale developments include an optical waveguide-based laser gyroscope, and resonant opto-mechanical structures with optical readout, for gun-hard gyroscopes and accelerometers, respectively.
TuC4.3 - SHAPE MEMORY ALLOY MEMS FOR LOW POWER AND FAST OPTICAL AND ELECTRICAL ACTUATION
Abstract
Abstract
Developments in the area of phase-change MEMS actuators has enabled fast and low power electrical and optical actuation of bistable MEMS actuators. By harnessing small volumes of SMA phase change actuator material, we have demonstrated electrical actuation beyond 1 kHz, below 10 mW.
TuC4.4 - PRECISION BEAM-STEERING WITH THE LIGHTFIELD DIRECTING ARRAY
- R. Panas (US) Lawrence Livermore National Laboratory
- C. Harvey (US) Lawrence Livermore National Laboratory
- S. Hunter (US) Lawrence Livermore National Laboratory
- P. Paul (US) Lawrence Livermore National Laboratory
- K. Enstrom (US) Lawrence Livermore National Laboratory
- T. Uphaus (US) Lawrence Livermore National Laboratory
- J. Hopkins (US) University of California Los Angeles
- J. Simonelli (US) University of California Los Angeles
- C. White (US) AM Fitzgerald
- F. Khademolhosseini (US) AM Fitzgerald
Abstract
Abstract
LLNL has developed a MEMS micromirror array design capable of large range of motion (+/-15deg mechanical), high speed (30+khz bandwidth), large apertures (2cm), high fill factor (>99%), and precision closed-loop control to provide coherent aperture operation in harsh and high noise environments.