ETP - Enabling Technologies in Photonics
  • C. Knick (US) US ARMY RESEARCH LABORATORY

TuC4.3 - SHAPE MEMORY ALLOY MEMS FOR LOW POWER AND FAST OPTICAL AND ELECTRICAL ACTUATION

Presentation Type
Invited Submission
Authors
  • C. Knick (US) US ARMY RESEARCH LABORATORY
Date
08/20/2019
Time
03:30 PM - 05:30 PM
Room
Emerald C
Duration
30 Minutes
Lecture Time
04:30 PM - 05:00 PM

Abstract

Abstract

Developments in the area of phase-change MEMS actuators has enabled fast and low power electrical and optical actuation of bistable MEMS actuators. By harnessing small volumes of SMA phase change actuator material, we have demonstrated electrical actuation beyond 1 kHz, below 10 mW.

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