M. Dawson (GB) University of Strathclyde, Institute of Photonics
University of Strathclyde Institute of PhotonicsAuthor Of 1 Presentation
(SS ML) Special Symposium on Micro LED
WA3.1 - MICROSCALE AUTOMATED ALIGNMENT AND SPATIAL TRACKING THROUGH STRUCTURED ILLUMINATION
Presentation Type
Contributed Submission
Authors
- M. Stonehouse (GB) University of Strathclyde
- A. Blanchard (GB) University of Strathclyde
- B. Guilhabert (GB) University of Strathclyde
- I. Watson (GB) University of Strathclyde
- E. Gu (GB) University of Strathclyde
- J. Herrnsdorf (GB) University of Strathclyde
- M. Dawson (GB) University of Strathclyde, Institute of Photonics
Date
10/02/2019
Time
01:30 PM - 02:45 PM
Room
El Mirador A
Duration
15 Minutes
Lecture Time
01:30 PM - 01:45 PM
Abstract
Abstract
We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.