(SS ML) Special Symposium on Micro LED
  • M. Stonehouse (GB) University of Strathclyde

WA3.1 - MICROSCALE AUTOMATED ALIGNMENT AND SPATIAL TRACKING THROUGH STRUCTURED ILLUMINATION

Presentation Type
Contributed Submission
Authors
  • M. Stonehouse (GB) University of Strathclyde
  • A. Blanchard (GB) University of Strathclyde
  • B. Guilhabert (GB) University of Strathclyde
  • I. Watson (GB) University of Strathclyde
  • E. Gu (GB) University of Strathclyde
  • J. Herrnsdorf (GB) University of Strathclyde
  • M. Dawson (GB) University of Strathclyde, Institute of Photonics
Date
10/02/2019
Time
01:30 PM - 02:45 PM
Room
El Mirador A
Duration
15 Minutes
Lecture Time
01:30 PM - 01:45 PM

Abstract

Abstract

We present a tracking and alignment capability for use in mask-less lithography systems. Through the use of micropixellated light emitting diode (LED) arrays, fluorescent clusters can be identified and used as alignment markers at micrometer scale.

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