Author Of 1 Presentation
ETP - Enabling Technologies in Photonics
TuC4.3 - SHAPE MEMORY ALLOY MEMS FOR LOW POWER AND FAST OPTICAL AND ELECTRICAL ACTUATION
Presentation Type
Invited Submission
Date
08/20/2019
Time
03:30 PM - 05:30 PM
Room
Emerald C
Duration
30 Minutes
Lecture Time
04:30 PM - 05:00 PM
Abstract
Abstract
Developments in the area of phase-change MEMS actuators has enabled fast and low power electrical and optical actuation of bistable MEMS actuators. By harnessing small volumes of SMA phase change actuator material, we have demonstrated electrical actuation beyond 1 kHz, below 10 mW.
Presenter Of 1 Presentation
ETP - Enabling Technologies in Photonics
TuC4.3 - SHAPE MEMORY ALLOY MEMS FOR LOW POWER AND FAST OPTICAL AND ELECTRICAL ACTUATION
Presentation Type
Invited Submission
Date
08/20/2019
Time
03:30 PM - 05:30 PM
Room
Emerald C
Duration
30 Minutes
Lecture Time
04:30 PM - 05:00 PM
Abstract
Abstract
Developments in the area of phase-change MEMS actuators has enabled fast and low power electrical and optical actuation of bistable MEMS actuators. By harnessing small volumes of SMA phase change actuator material, we have demonstrated electrical actuation beyond 1 kHz, below 10 mW.